David Bullett Nanofabrication Facility

Contact details

For general enquiries, please email ebl-access@bath.ac.uk

Applications should be submitted through the contact form

Dr Stephen Wedge
Tel: +44 (0) 1225 386956

Professor Simon Bending
Tel: +44 (0) 1225 385173

Dr Steve Andrews
Tel: +44 (0) 1225 386651

Dr Philip Shields
Tel: +44 (0) 1225 386309

Free Access to Electron Beam Lithography at the University of Bath

UK researchers at Higher Education Institutions are now able to get free access to Electron Beam Lithography and supporting processes in the David Bullett Nanofabrication Facility at the University of Bath.   This is made possible under a 48 month grant (01/08/13 - 30/06/2017), funded by the EPSRC "Access to Materials Research Equipment" programme.  This programme has bought out 20% of the available time on these instruments and also pays all travel and subsistence costs incurred by visiting scientists. 

Applications from researchers working in the biological or life sciences are particularly encouraged.

Brief summary of services offered

Access to our advanced electron-beam lithography system (Hitachi S-4300 Scanning Electron Microscope & Raith ElphyPlus Professional Lithography Attachment) and supporting processes, including thin film deposition and wet/dry etching facilities. Expert assistance will be provided at all stages of the work including:

  • expert support for process design
  • expert support for CAD pattern design
  • expert hands-on technical assistance with resist preparation, lithography and additional processes.

Accessing the instrument

Access to the instrument via the EPSRC programme will be managed by the Nanofabrication Facility Advisory Group consisting of Professor Simon Bending, Dr Steve Andrews, Dr Stephen Wedge and Dr Philip Shields. Access proposals will be considered at any time and should be submitted via the online contact form (link at the bottom of the page). Potential users with preliminary enquiries or those seeking clarification are encouraged to email ebl-access@bath.ac.uk or contact the members of the Advisory Group by telephone.

Criteria for evaluating access requests

  • The scientific merit
  • the appropriateness
  • the feasibility of the proposed work.

Time frame

Applications can be made at any time using the online contact form. All new jobs will be reviewed at a meeting of the Advisory Group within 72 hours of first contact. Subject to a positive evaluation we will attempt to schedule the job within two weeks of the first enquiry (subject to availability). We anticipate that most jobs will use blocks of one to three consecutive days, more if significant pattern development/evolution is required and/or access to supporting processes.

How to apply and frequently asked questions

Please complete and submit the online contact form below.

For further clarification read the programme's frequently asked questions.  

Contact form