David Bullett Nanofabrication Facility

We provide access and training on specialist equipment for micro-scale and nano-scale fabrication for University of Bath researchers and external organisations.

Overview

Watch a video showing some of the equipment in the facility



Our equipment

Our individual items of equipment can be used separately or in sequence to create micro- or nano-scale electronic or optical devices.


Micro-scale lithography

Person using the direct laser writer

The David Bullett Nanofabrication Facility houses different photolithography tools that are available for internal and external users.

Nano-scale lithography

Researcher working at the electron beam lithography system at the University of Bath

The David Bullett Nanofabrication Facility houses various different systems that are capable of patterning materials at the nanoscale

Thin-film deposition

Person using the sputter coater

The David Bullett Nanofabrication Facility houses various systems for the deposition of thin layers of metal and non-metal materials.

Etching

dry etching equipment

The David Bullett Nanofabrication Facility includes facilities for the dry and wet etching of materials.

Characterisation

Person using the surface profiler

The David Bullett Nanofabrication Facility houses various tools for characterising the physical properties of materials.


How to use the facility

We provide full support and training so that you can use our facility



Some examples of our work

Work in the Nanofabrication Facility has had an impact in the University's research and teaching


About us

The nanofabrication facility is an ISO class 6 suite of cleanrooms that house specialist materials patterning, deposition and processing equipment. The equipment can be used separately or sequentially to create structures, for example, for studying the electronic, magnetic and optical properties of materials, as well as creating devices such as biosensors and light-emitting diodes (LEDs).


David Bullett Nanofabrication Facility, 3 West Annexe University of Bath Claverton Down Bath BA2 7AY United Kingdom

Contact us

If you wish to find out more about accessing these facilities and equipment, please contact the cleanroom facility manager.