Access for new Bath users
University of Bath personnel are welcome to contact the Facility Manager to discuss what equipment and support is available to best meet your needs.
Before you can access the facility you will need to:
- Complete a COSHH form for any chemicals that you will use in the facility,
- Attend a Chemical Induction,
- Attend a Cleanroom Induction.
The facility charges University of Bath researchers to access the facility and to use its equipment. This ensures good maintenance of the equipment and the cleanroom environment. Training is provided on all equipment.
There is an access charge to enter the cleanroom facility to support the baseline costs such as cleanroom suits, commonly-used acids, solvents and photo-resists etc.
The access charge also covers the use of the following equipment:
- Direct Laser Writer
- Mask Aligner
- Plasma Enhanced Chemical Vapour Deposition (PECVD) system
- Ar-Ion Miller, Surface Profiler
- Rapid Thermal Processor
- Spin Coaters
- Wet Benches
- Leica Optical Microscope
- Wafer Scriber
An equipment usage charge per session is also levied on the following equipment due to their higher maintenance costs:
- Scanning Electron Microscope (SEM)/ Electron Beam Lithography (EBL)
- Electron Beam Evaporator
- Thermal Evaporator
- Sputter Coater
- Inductively Coupled Plasma/Reactive-Ion Etching (ICP/RIE)
Access for external users
Potential users of the Nanofabrication Facility are encouraged to contact the Facility Manager to discuss what equipment and support is available to best meet your needs.
The facility charges users to access the facility and to use its equipment. This ensures good maintenance of the equipment and the cleanroom environment. Training is provided on all equipment.
The Facility Manager will arrange for lab access and for equipment to be booked prior to your visit.